Elemental Analysis using EDS

Hi-Vac SEM
Low-Vac SEM
Cryo SEM
TEM Imaging

SEM Energy Dispersive Spectroscopy (EDS or XEDS)

Primary beam electrons interact with sample atoms to produce X-rays that carry information as to the type of atoms, and thus elements, in the sample. Energy Dispersive X-ray Spectroscopy (EDS) utilizes this production of X-rays to identify types and locations of elements within the sample area. Such information can be displayed as a simple spectrum identifying the elements present, as elemental maps or line scans across the sample surface, or as a compositional determination of weight% or atomic% of the elements present based on their mass. We utilize a field emission SEM and associated Oxford Oxford INCA Xstream-2 EDS system, with a highly sensitive Xmax80 silicon drift detector (SDD), to identify impurities and unknown contaminants within samples and verify sample composition.

Elemental Analysis using EDS


TEM Energy Dispersive Spectroscopy (EDS or XEDS)

Information can also be obtained from transmission electron microscopy (TEM) samples using EDS.  In this case the sample can be biological, with accumulations of specific elements within cells, or material in nature.  Materials samples include coated nano-particles, nano-wires, minerals. and thin films. Many of these samples require the higher resolution and magnification  of TEM for good imaging, but provide a very small “target” for generation of x-rays needed in energy dispersive spectrometry (EDS) analysis.  We use an EDS system with modern silicon drift technology, the Oxford INCA EnergyTEM 250 TEM Microanalysis System equipped with an 80mm window for accurate and efficient x-ray analysis.